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Polymer films and coatings deposited by using electron and ion treatment
(2019) Zadorozhny, V. G.; Fedosov, S. N.; Sergeeva, A. E.
The book contains information about modern achievements in the field of deposition of thin polymer films in a vacuum. The features of the effect of temperature, ultraviolet irradiation, electron flux, glow discharge on the process of thin polymer films formation are considered. Much attention is paid to the processes of evaporation and condensation of polymers in vacuum, as well as processes of structure formation, protective, dielectric and optical properties of the obtained films and coatings. The prospects for the use of thin polymer films in microelectronics, optics and precision engineering are discussed. The book can be useful to scientific and engineering staff, graduate students, students specializing in the physics and chemistry of polymers, thin-film technology and materials science