Gas Velosity and Mass Flowrate Scaling Modeling in Microelectronics’ Thermal Control Systems

dc.contributor.authorB. V. Kosoy, Y. Utaka
dc.date.accessioned2018-12-19T14:41:22Z
dc.date.available2018-12-19T14:41:22Z
dc.date.issued2018
dc.description.abstractIn the present research we investigate pressure driven flow in the transition and free-molecular flow regimes with the objective of developing unified flow models for microchannels. These models are based on a velocity scaling law, which is valid for a wide range of Knudsen number. Simple slip-based descriptions of flowrate in microchannels are corrected for effects in the transition and free-molecular flow regimes with the introduction of a rarefaction factor. The resulting models can predict the velocity distribution, mass flowrate, pressure and shear stress distribution in rectangular microchannels in the entire Knudsen flow regime.
dc.identifier.issn0453-8307
dc.identifier.urihttps://card-file.ontu.edu.ua/handle/123456789/6480
dc.identifier.urihttps://doi.org/10.15673/ret.v53i6.923
dc.sourceRefrigeration Engineering and Technology
dc.titleGas Velosity and Mass Flowrate Scaling Modeling in Microelectronics’ Thermal Control Systems
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