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- ДокументModel of the formation of the microstructure of nanocoatings(2022) Derevianko, O. I.A simulation model of the PVD process is proposed and its adequacy is shown based on the criterion of fractal dimension. PVD (Physical Vapor Deposition) technology, in which the starting material is evaporated in a separate chamber is transported through a gaseous medium and deposited on a substrate.